# An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 11× · AI/ML

**Wikidata**: [openalex:W4210539455](https://www.wikidata.org/wiki/openalex:W4210539455)  
**Source**: https://4ort.xyz/entity/an-autoencoder-based-approach-for-fault-detection-in-multi-stage-manufacturing-a-sputter-deposition-and-rapid-thermal-pr