# An area-variant type MEMS capacitive sensor based on a novel bionic swallow structure for high sensitive nano-indentation measurement

> Research article (Measurement, 2022) · cited 10× · AI/ML

**Wikidata**: [openalex:W4285807432](https://www.wikidata.org/wiki/openalex:W4285807432)  
**Source**: https://4ort.xyz/entity/an-area-variant-type-mems-capacitive-sensor-based-on-a-novel-bionic-swallow-structure-for-high-sensitive-nano-indentatio