# An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

> Research article (Microsystems & Nanoengineering, 2023) · cited 67× · AI/ML

**Wikidata**: [openalex:W4323270127](https://www.wikidata.org/wiki/openalex:W4323270127)  
**Source**: https://4ort.xyz/entity/an-aerosol-deposition-based-mems-piezoelectric-accelerometer-for-low-noise-measurement