# An adaptive Copula function-based framework for fault detection in semiconductor wafer fabrication

> Research article (Computers & Industrial Engineering, 2024) · cited 13× · AI/ML

**Wikidata**: [openalex:W4391042604](https://www.wikidata.org/wiki/openalex:W4391042604)  
**Source**: https://4ort.xyz/entity/an-adaptive-copula-function-based-framework-for-fault-detection-in-semiconductor-wafer-fabrication