# Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors

> Research article (Journal of Microelectromechanical Systems, 2018) · cited 37× · AI/ML

**Wikidata**: [openalex:W2783287032](https://www.wikidata.org/wiki/openalex:W2783287032)  
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