# AlN-on-SOI platform-based micro-machined hydrophone

> Research article (Applied Physics Letters, 2016) · cited 64× · AI/ML

**Wikidata**: [openalex:W2505965987](https://www.wikidata.org/wiki/openalex:W2505965987)  
**Source**: https://4ort.xyz/entity/aln-on-soi-platform-based-micro-machined-hydrophone