# Aln-on-SOI platform-based MEMS hydrophone with ultra-low operation frequency and ultra-high noise resolution

> Research article (2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016) · cited 10× · AI/ML

**Wikidata**: [openalex:W2290418103](https://www.wikidata.org/wiki/openalex:W2290418103)  
**Source**: https://4ort.xyz/entity/aln-on-soi-platform-based-mems-hydrophone-with-ultra-low-operation-frequency-and-ultra-high-noise-resolution