# Alleviating Class-Imbalance Data of Semiconductor Equipment Anomaly Detection Study

> Research article (Electronics, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4317931983](https://www.wikidata.org/wiki/openalex:W4317931983)  
**Source**: https://4ort.xyz/entity/alleviating-class-imbalance-data-of-semiconductor-equipment-anomaly-detection-study