# Algorithms for using silicon steps for scanning probe microscope evaluation

> Research article (Metrologia, 2020) · cited 16× · AI/ML

**Wikidata**: [openalex:W3034649849](https://www.wikidata.org/wiki/openalex:W3034649849)  
**Source**: https://4ort.xyz/entity/algorithms-for-using-silicon-steps-for-scanning-probe-microscope-evaluation