# Advanced Optical Proximity Correction (OPC) Techniques in Computational Lithography: Addressing the Challenges of Pattern Fidelity and Edge Placement Error

> Research article (Global Journal of Medical Case Reports, 2022) · cited 64× · AI/ML

**Wikidata**: [openalex:W4408411121](https://www.wikidata.org/wiki/openalex:W4408411121)  
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