# Advanced detector signal acquisition and electron beam scanning for high resolution SEM imaging

> Research article (Ultramicroscopy, 2018) · cited 51× · AI/ML

**Wikidata**: [openalex:W2889221316](https://www.wikidata.org/wiki/openalex:W2889221316)  
**Source**: https://4ort.xyz/entity/advanced-detector-signal-acquisition-and-electron-beam-scanning-for-high-resolution-sem-imaging