# Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process

> Research article (Journal of the Franklin Institute, 2023) · cited 14× · AI/ML

**Wikidata**: [openalex:W4318384285](https://www.wikidata.org/wiki/openalex:W4318384285)  
**Source**: https://4ort.xyz/entity/adaptive-iterative-extended-state-observer-based-data-driven-iterative-learning-model-predictive-control-for-semiconduct