# Adaptive fault detection framework for recipe transition in semiconductor manufacturing

> Research article (Computers & Industrial Engineering, 2021) · cited 20× · AI/ML

**Wikidata**: [openalex:W3196018676](https://www.wikidata.org/wiki/openalex:W3196018676)  
**Source**: https://4ort.xyz/entity/adaptive-fault-detection-framework-for-recipe-transition-in-semiconductor-manufacturing