# Adaptive CUSUM Location Control Charts Based on Score Functions: An Application in Semiconductor Wafer Field

> Research article (Arabian Journal for Science and Engineering, 2021) · cited 14× · AI/ML

**Wikidata**: [openalex:W3183553805](https://www.wikidata.org/wiki/openalex:W3183553805)  
**Source**: https://4ort.xyz/entity/adaptive-cusum-location-control-charts-based-on-score-functions-an-application-in-semiconductor-wafer-field