# Active cluster annotation for wafer map pattern classification in semiconductor manufacturing

> Research article (Expert Systems with Applications, 2021) · cited 22× · AI/ML

**Wikidata**: [openalex:W3177093435](https://www.wikidata.org/wiki/openalex:W3177093435)  
**Source**: https://4ort.xyz/entity/active-cluster-annotation-for-wafer-map-pattern-classification-in-semiconductor-manufacturing