# Actinic inspection of EUV reticles with arbitrary pattern design

> Research article (International Conference on Extreme Ultraviolet Lithography 2017, 2017) · cited 19× · AI/ML

**Wikidata**: [openalex:W2766213100](https://www.wikidata.org/wiki/openalex:W2766213100)  
**Source**: https://4ort.xyz/entity/actinic-inspection-of-euv-reticles-with-arbitrary-pattern-design