# Achieving the Defect Transfer Detection of Semiconductor Wafer by a Novel Prototype Learning-Based Semantic Segmentation Network

> Research article (IEEE Transactions on Instrumentation and Measurement, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4389104722](https://www.wikidata.org/wiki/openalex:W4389104722)  
**Source**: https://4ort.xyz/entity/achieving-the-defect-transfer-detection-of-semiconductor-wafer-by-a-novel-prototype-learning-based-semantic-segmentation