# Accurate prediction of EUV lithographic images and 3D mask effects using generative networks

> Research article (Journal of Micro/Nanopatterning Materials and Metrology, 2021) · cited 20× · AI/ML

**Wikidata**: [openalex:W3213872120](https://www.wikidata.org/wiki/openalex:W3213872120)  
**Source**: https://4ort.xyz/entity/accurate-prediction-of-euv-lithographic-images-and-3d-mask-effects-using-generative-networks