# Accurate lithography simulation model based on convolutional neural networks

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 34× · AI/ML

**Wikidata**: [openalex:W2736295327](https://www.wikidata.org/wiki/openalex:W2736295327)  
**Source**: https://4ort.xyz/entity/accurate-lithography-simulation-model-based-on-convolutional-neural-networks