# Accurate lithography hotspot detection using deep convolutional neural networks

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 75× · AI/ML

**Wikidata**: [openalex:W2553320496](https://www.wikidata.org/wiki/openalex:W2553320496)  
**Source**: https://4ort.xyz/entity/accurate-lithography-hotspot-detection-using-deep-convolutional-neural-networks