# Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror With a Fourier Series-Based Torque Approximation

> Research article (Journal of Microelectromechanical Systems, 2020) · cited 14× · AI/ML

**Wikidata**: [openalex:W3091308168](https://www.wikidata.org/wiki/openalex:W3091308168)  
**Source**: https://4ort.xyz/entity/accurate-analytic-model-of-a-parametrically-driven-resonant-mems-mirror-with-a-fourier-series-based-torque-approximation
