# Accelerated deep self-supervised ptycho-laminography for three-dimensional nanoscale imaging of integrated circuits

> Research article (Optica, 2023) · cited 12× · AI/ML

**Wikidata**: [openalex:W4380046162](https://www.wikidata.org/wiki/openalex:W4380046162)  
**Source**: https://4ort.xyz/entity/accelerated-deep-self-supervised-ptycho-laminography-for-three-dimensional-nanoscale-imaging-of-integrated-circuits