# Ablation depth control with 40 nm resolution on ITO thin films using a square, flat top beam shaped femtosecond NIR laser

> Research article (Optics and Lasers in Engineering, 2016) · cited 23× · AI/ML

**Wikidata**: [openalex:W2341861084](https://www.wikidata.org/wiki/openalex:W2341861084)  
**Source**: https://4ort.xyz/entity/ablation-depth-control-with-40-nm-resolution-on-ito-thin-films-using-a-square-flat-top-beam-shaped-femtosecond-nir-laser