# Aberration optimization in an extreme ultraviolet lithography projectorvia a BP neural network and simulated annealing algorithm

> Research article (Applied Optics, 2021) · cited 12× · AI/ML

**Wikidata**: [openalex:W3118681141](https://www.wikidata.org/wiki/openalex:W3118681141)  
**Source**: https://4ort.xyz/entity/aberration-optimization-in-an-extreme-ultraviolet-lithography-projectorvia-a-bp-neural-network-and-simulated-annealing-a