# Aberration analysis and compensate method of a BP neural network and sparrow search algorithm in deep ultraviolet lithography

> Research article (Applied Optics, 2022) · cited 15× · AI/ML

**Wikidata**: [openalex:W4283371350](https://www.wikidata.org/wiki/openalex:W4283371350)  
**Source**: https://4ort.xyz/entity/aberration-analysis-and-compensate-method-of-a-bp-neural-network-and-sparrow-search-algorithm-in-deep-ultraviolet-lithog