# A wafer surface defect detection method built on generic object detection network

> Research article (Digital Signal Processing, 2022) · cited 27× · AI/ML

**Wikidata**: [openalex:W4294904323](https://www.wikidata.org/wiki/openalex:W4294904323)  
**Source**: https://4ort.xyz/entity/a-wafer-surface-defect-detection-method-built-on-generic-object-detection-network