# A Wafer Prealignment Algorithm Based on Fourier Transform and Least Square Regression

> Research article (IEEE Transactions on Automation Science and Engineering, 2017) · cited 16× · AI/ML

**Wikidata**: [openalex:W2595311085](https://www.wikidata.org/wiki/openalex:W2595311085)  
**Source**: https://4ort.xyz/entity/a-wafer-prealignment-algorithm-based-on-fourier-transform-and-least-square-regression