# A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization

> Research article (Computers in Industry, 2020) · cited 48× · AI/ML

**Wikidata**: [openalex:W3014776486](https://www.wikidata.org/wiki/openalex:W3014776486)  
**Source**: https://4ort.xyz/entity/a-virtual-metrology-method-with-prediction-uncertainty-based-on-gaussian-process-for-chemical-mechanical-planarization