# A time division capacitive feedback method of electrostatic MEMS mirror driven by PWM signal

> Research article (Sensors and Actuators A Physical, 2021) · cited 12× · AI/ML

**Wikidata**: [openalex:W3133325991](https://www.wikidata.org/wiki/openalex:W3133325991)  
**Source**: https://4ort.xyz/entity/a-time-division-capacitive-feedback-method-of-electrostatic-mems-mirror-driven-by-pwm-signal