# A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

> Research article (Review of Scientific Instruments, 2023) · cited 78× · AI/ML

**Wikidata**: [openalex:W4387439781](https://www.wikidata.org/wiki/openalex:W4387439781)  
**Source**: https://4ort.xyz/entity/a-survey-on-the-mechanical-design-for-piezo-actuated-compliant-micro-positioning-stages