# A sub-200 nanometer wide 3D stacking thin-film temperature sensor

> Research article (RSC Advances, 2016) · cited 13× · AI/ML

**Wikidata**: [openalex:W2316751697](https://www.wikidata.org/wiki/openalex:W2316751697)  
**Source**: https://4ort.xyz/entity/a-sub-200-nanometer-wide-3d-stacking-thin-film-temperature-sensor