# A Study on the Pattern Effects of Chemical Mechanical Planarization with CNN-Based Models

> Research article (Electronics, 2020) · cited 10× · AI/ML

**Wikidata**: [openalex:W3043787075](https://www.wikidata.org/wiki/openalex:W3043787075)  
**Source**: https://4ort.xyz/entity/a-study-on-the-pattern-effects-of-chemical-mechanical-planarization-with-cnn-based-models