# A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators

> Research article (Micromachines, 2019) · cited 14× · AI/ML

**Wikidata**: [openalex:W2985114906](https://www.wikidata.org/wiki/openalex:W2985114906)  
**Source**: https://4ort.xyz/entity/a-study-on-the-effects-of-bottom-electrode-designs-on-aluminum-nitride-contour-mode-resonators
