# A Structure Data-Driven Framework for Virtual Metrology Modeling

> Research article (IEEE Transactions on Automation Science and Engineering, 2019) · cited 30× · AI/ML

**Wikidata**: [openalex:W2978187484](https://www.wikidata.org/wiki/openalex:W2978187484)  
**Source**: https://4ort.xyz/entity/a-structure-data-driven-framework-for-virtual-metrology-modeling