# A stiffness modeling approach for multi-leaf spring mechanism supporting coupling error analysis of nano-stages

> Research article (International Journal of Precision Engineering and Manufacturing, 2017) · cited 18× · AI/ML

**Wikidata**: [openalex:W2623141744](https://www.wikidata.org/wiki/openalex:W2623141744)  
**Source**: https://4ort.xyz/entity/a-stiffness-modeling-approach-for-multi-leaf-spring-mechanism-supporting-coupling-error-analysis-of-nano-stages