# A SIX-LEGGED MEMS SILICON ROBOT USING MULTICHIP ASSEMBLY

> Research article (2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 2018) · cited 14× · AI/ML

**Wikidata**: [openalex:W2911260301](https://www.wikidata.org/wiki/openalex:W2911260301)  
**Source**: https://4ort.xyz/entity/a-six-legged-mems-silicon-robot-using-multichip-assembly