# A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage

> Research article (Smart Materials and Structures, 2015) · cited 20× · AI/ML

**Wikidata**: [openalex:W2282898244](https://www.wikidata.org/wiki/openalex:W2282898244)  
**Source**: https://4ort.xyz/entity/a-six-degree-of-freedom-magnetic-levitation-fine-stage-for-a-high-precision-and-high-acceleration-dual-servo-stage