# A single-mass self-resonating closed-loop capacitive MEMS accelerometer

> Research article (2016 IEEE SENSORS, 2016) · cited 15× · AI/ML

**Wikidata**: [openalex:W2579718039](https://www.wikidata.org/wiki/openalex:W2579718039)  
**Source**: https://4ort.xyz/entity/a-single-mass-self-resonating-closed-loop-capacitive-mems-accelerometer