# A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

> Research article (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015) · cited 10× · AI/ML

**Wikidata**: [openalex:W1532127406](https://www.wikidata.org/wiki/openalex:W1532127406)  
**Source**: https://4ort.xyz/entity/a-silicon-based-fourier-transform-spectrometer-base-on-an-open-loop-controlled-electrothermal-mems-mirror