# A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks

> Research article (Journal of Intelligent Manufacturing, 2020) · cited 18× · AI/ML

**Wikidata**: [openalex:W3047760593](https://www.wikidata.org/wiki/openalex:W3047760593)  
**Source**: https://4ort.xyz/entity/a-run-to-run-controller-for-a-chemical-mechanical-planarization-process-using-least-squares-generative-adversarial-netwo