# A robust edge-based template matching algorithm for displacement measurement of compliant mechanisms under scanning electron microscope

> Research article (Review of Scientific Instruments, 2021) · cited 11× · AI/ML

**Wikidata**: [openalex:W3133873893](https://www.wikidata.org/wiki/openalex:W3133873893)  
**Source**: https://4ort.xyz/entity/a-robust-edge-based-template-matching-algorithm-for-displacement-measurement-of-compliant-mechanisms-under-scanning-elec