# A Robust Approach for Process Variation Aware Mask Optimization

> Research article (Design, Automation & Test in Europe Conference & Exhibition (DATE), 2015, 2015) · cited 30× · AI/ML

**Wikidata**: [openalex:W4241870777](https://www.wikidata.org/wiki/openalex:W4241870777)  
**Source**: https://4ort.xyz/entity/a-robust-approach-for-process-variation-aware-mask-optimization