# A resonant pressure MEMS sensor based on levitation force excitation detection

> Research article (Nonlinear Dynamics, 2020) · cited 29× · AI/ML

**Wikidata**: [openalex:W3013489184](https://www.wikidata.org/wiki/openalex:W3013489184)  
**Source**: https://4ort.xyz/entity/a-resonant-pressure-mems-sensor-based-on-levitation-force-excitation-detection