# A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz<sup>1/2</sup> Noise Floor

> Research article (Journal of Microelectromechanical Systems, 2019) · cited 78× · AI/ML

**Wikidata**: [openalex:W2938234592](https://www.wikidata.org/wiki/openalex:W2938234592)  
**Source**: https://4ort.xyz/entity/a-resonant-mems-accelerometer-with-56ng-bias-stability-and-98ng-hz-sup-1-2-sup-noise-floor
