# A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective

> Research article (IEEE Access, 2021) · cited 27× · AI/ML

**Wikidata**: [openalex:W3158100850](https://www.wikidata.org/wiki/openalex:W3158100850)  
**Source**: https://4ort.xyz/entity/a-realizable-overlay-virtual-metrology-system-in-semiconductor-manufacturing-proposal-challenges-and-future-perspective