# A real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer based on resonant frequency

> Research article (2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2017) · cited 16× · AI/ML

**Wikidata**: [openalex:W2753829967](https://www.wikidata.org/wiki/openalex:W2753829967)  
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