# A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

> Research article (Microsystems & Nanoengineering, 2023) · cited 40× · AI/ML

**Wikidata**: [openalex:W4389109029](https://www.wikidata.org/wiki/openalex:W4389109029)  
**Source**: https://4ort.xyz/entity/a-polymeric-piezoelectric-mems-accelerometer-with-high-sensitivity-low-noise-density-and-an-innovative-manufacturing-app