# A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density

> Research article (Sensors and Actuators A Physical, 2020) · cited 59× · AI/ML

**Wikidata**: [openalex:W3112721650](https://www.wikidata.org/wiki/openalex:W3112721650)  
**Source**: https://4ort.xyz/entity/a-piezoelectric-aln-mems-hydrophone-with-high-sensitivity-and-low-noise-density