# A physics-informed Run-to-Run control framework for semiconductor manufacturing

> Research article (Expert Systems with Applications, 2020) · cited 21× · AI/ML

**Wikidata**: [openalex:W3020982770](https://www.wikidata.org/wiki/openalex:W3020982770)  
**Source**: https://4ort.xyz/entity/a-physics-informed-run-to-run-control-framework-for-semiconductor-manufacturing