# A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing

> Research article (Algorithms, 2018) · cited 15× · AI/ML

**Wikidata**: [openalex:W2810019704](https://www.wikidata.org/wiki/openalex:W2810019704)  
**Source**: https://4ort.xyz/entity/a-novel-method-for-control-performance-assessment-with-fractional-order-signal-processing-and-its-application-to-semicon